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Title: Characterization of AlCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy
Authors: Nohira, Hiroshi
Tsai, Wilman
Besling, Wim
Young, Edward
Pétry, Jasmine
Conard, Thierry
Vandervorst, Wilfried
De Gendt, Stefan
Heyns, Marc
Maes, Jos
Tuominen, Marko
Issue Date: 2001
Conference: Symposium Q of the E-MRS Spring Meeting 2001: High-k Gate Dielectrics; June 5-8, 2001; Strasbourg, France. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Faculty of Engineering Science - miscellaneous
Electrical Engineering - miscellaneous

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