Title: Comparison of Co silicidation on SiGe and SiGeC alloys
Authors: Donaton, R. A
Maex, Karen
Vantomme, André
St. Amour, A
Sturm, J. C
Issue Date: 1996
Conference: Materials Research Society Spring Meeting. Symposium F on GeSi and Related Compounds; April 9-11, 1996; San Francisco, Calif., U
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Nuclear and Radiation Physics Section
Associated Section of ESAT - INSYS, Integrated Systems

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