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Title: Pull-in voltage analysis of fixed-fixed beams
Authors: PAMIDIGHANTAM, SAYANU ×
Puers, Robert
Tilmans, Harrie #
Issue Date: 2001
Host Document: pages:269-272
Conference: Proceedings 12th Micromechanics Europe Workshop - MME date:16/09/01
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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