Title: Properties of porous HSQ-based films capped by plasma enhanced chemical vapor deposition dielectric layers
Authors: Iacopi, Francesca ×
Baklanov, Mikhaïl
Sleeckx, Erik
Conrad, T
Bender, Hugo
Meynen, Herman
Maex, Karen #
Issue Date: 2002
Series Title: Journal of Vacuum Science & Technology B vol:20 issue:1 pages:109-115
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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