|ITEM METADATA RECORD
|Title: ||Properties of porous HSQ-based films capped by plasma enhanced chemical vapor deposition dielectric layers|
|Authors: ||Iacopi, Francesca ×|
Maex, Karen #
|Issue Date: ||2002 |
|Series Title: ||Journal of Vacuum Science & Technology B vol:20 issue:1 pages:109-115|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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