Title: Overcoming barrier integrity issues of I-PVD deposited Ta(N) barriers on inorganic porous low-k's
Authors: Iacopi, Francesca ×
Tokei, Zsolt
Shamiryan, Denis
Le, Quoc Toan
Malhouitre, Stéphane
Van Hove, Marleen
Maex, Karen #
Issue Date: 2002
Publisher: MRS
Host Document: pages:61-66
Conference: Conference Proceedings ULSI XVII location:Leuven Belgium date:09/10/01
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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