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Title: Cu/LKD-5109 damascene integration demonstration using FF-02 low-k spin-on hard-mask and embedded etch-stop
Authors: Kokubo, Terukazu ×
Das, Arabinda
Furukawa, Yukiko
Vos, Ingrid
Iacopi, Francesca
Struyf, Herbert
Van Aelst, Joke
Maenhoudt, Mireille
Tokei, Zsolt
Vervoort, Iwan
Bender, Hugo
Stucchi, Michele
Schaekers, Marc
Boullart, Werner
Van Hove, Marleen
Vanhaelemeersch, Serge
Peterson, William
Shiota, A
Maex, Karen #
Issue Date: 2002
Host Document: pages:51-53
Conference: Proceedings of the IEEE International Interconnect Technology Conference date:03/06/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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