Title: Use of a capacitance voltage technique to study copper drift diffusion in (porous) inorganic low-k Materials
Authors: Lanckmans, Filip ×
Maex, Karen #
Issue Date: 2002
Series Title: Microelectronic Engineering vol:60 issue:01/02/07 pages:125-132
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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