|ITEM METADATA RECORD
|Title: ||Use of a capacitance voltage technique to study copper drift diffusion in (porous) inorganic low-k Materials|
|Authors: ||Lanckmans, Filip ×|
Maex, Karen #
|Issue Date: ||2002 |
|Series Title: ||Microelectronic Engineering vol:60 issue:01/02/07 pages:125-132|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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