ITEM METADATA RECORD
Title: Interface characterization of Si-passivated HfO2 germanium capacitors using DLTS measurements
Authors: Martens, Koen ×
Simoen, Eddy
De Jaeger, Brice
Meuris, Marc
Groeseneken, Guido
Maes, Herman #
Issue Date: 2006
Publisher: Pergamon
Series Title: Materials science in semiconductor processing vol:9 issue:4-5 pages:749-752
ISSN: 1369-8001
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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