Title: Materials and thermal stability of tantalum carbide layers for metal gate applications
Authors: Zhao, Chao ×
Schram, Tom
Van Ammel, Annemie
Conard, Thierry
De Gendt, Stefan
Yamada, Tomotaka #
Issue Date: 2006
Publisher: IEEE
Host Document: pages:418-420
Conference: Proceedings 8th International Conference on Solid-State and Integrated-Circuit Technology - ICSICT location:Leuven Belgium date:23/10/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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