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|ITEM METADATA RECORD
|Title: ||Effective work function modulation by As implantation in metal gate stacks|
|Authors: ||Singanamalla, Raghunath ×|
De Gendt, Stefan
De Meyer, Christina #
|Issue Date: ||2006 |
|Host Document: ||pages:49-60|
|Conference: ||Dielectrics for Nanosystems II: Materials Science, Processing, Reliability, and Manufacturing location:Leuven Belgium date:01/05/06|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Molecular Design and Synthesis|
Electrical Engineering - miscellaneous
× corresponding author|
# (joint) last author|
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