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Title: Effective work function modulation by As implantation in metal gate stacks
Authors: Singanamalla, Raghunath ×
Yu, HongYu
Janssens, Tom
Witters, Thomas
Schram, Tom
Kubicek, Stefan
De Gendt, Stefan
Jurczak, Malgorzata
De Meyer, Christina #
Issue Date: 2006
Publisher: ECS
Host Document: pages:49-60
Conference: Dielectrics for Nanosystems II: Materials Science, Processing, Reliability, and Manufacturing location:Leuven Belgium date:01/05/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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