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Title: Characterization of KrF excimer laser annealed PECVD SixGe1-x for MEMS post processing
Authors: Sedky, S ×
Gromova, Maria
Van der Donck, Tom
Celis, Jean-Pierre
Witvrouw, Ann
Issue Date: 2006
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:127 pages:316-323
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Department of Materials Engineering - miscellaneous
Chemical and Extractive Metallurgy Section (-)
× corresponding author

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