Title: Scalability of stress induced by contact-etch-stop layers: a simulation study
Authors: Eneman, Geert ×
Verheyen, Peter
De Keersgieter, An
Jurczak, Malgorzata
De Meyer, Christina #
Issue Date: 2007
Series Title: IEEE Transactions on Electron Devices vol:54 issue:6 pages:1446-1453
ISSN: 0018-9383
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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