Title: Performance enhancement of Poly-Si/TiN/SiON based pMOSFETs by addition of an AlO capping layer
Authors: Singanamalla, Raghunath ×
Yu, HongYu
O'Sullivan, Barry
Petry, Jasmine
Mercha, Abdelkarim
Paraschiv, Vasile
Volders, Henny
Kubicek, Stefan
De Meyer, Christina
Biesemans, Serge #
Issue Date: 2007
Series Title: Microelectronic Engineering vol:84 issue:09/10/07 pages:1865-1868
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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