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Title: The study effective work function modulation by As implantation in metal gate stacks
Authors: Singanamalla, Raghunath ×
Yu, HongYu
Janssens, Tom
Kubicek, Stefan
De Meyer, Christina #
Issue Date: Mar-2007
Series Title: Japanese Journal of Applied Physics. Part 2: Letters vol:46 issue:14 pages:L320-L322
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Vesalius Research Centre (-)
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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