Title: Ultra thin gate oxide technology and reliability
Authors: Heyns, Marc ×
Depas, Michel
Teerlinck, Ivo
Meuris, Marc
Mertens, Paul
Vanhellemont, Jan
Mouche, Laurent
Nigam, Tanya
Wilhelm, Rudi
Knotter, Martin
Wolke, K
Crossley, A
Sofield, C. J
Gräf, D #
Issue Date: 1996
Host Document: pages:208-211
Conference: Proceedings 5th International Symposium on Semiconductor Manufacturing (ISSM'96); 2-4 October 1996; Tokyo, Japan. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
× corresponding author
# (joint) last author

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