Title: Electrochemical deposition of copper alloys
Authors: Quoc, Toan Le
Vervoort, Iwan
Conard, Thierry
Maex, Karen
Issue Date: 2001
Conference: Advanced Metallization Conference; 9-11 October 2001; Montreal, Canada.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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