Title: Measurement and simulation of boron diffusion in strained Si1- xGex epitaxial layers
Authors: Krishnasamy, Rajendran ×
Schoenmaker, Wim
Decoutere, Stefaan
Loo, Roger
Caymax, Matty
Vandervorst, Wilfried #
Issue Date: Sep-2001
Series Title: IEEE Transactions on Electron Devices vol:48 issue:9 pages:2022-2031
ISSN: 0018-9383
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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