ITEM METADATA RECORD
Title: Removal of organic contamination from silicon surfaces
Authors: Kenens, Conny ×
Storm, Wolfgang
Knotter, D. M
De Gendt, Stefan
Vandervorst, Wilfried
Heyns, Marc #
Issue Date: 1996
Host Document: pages:107-110
Conference: Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '96); 23-25 Sept. 1996; Antw location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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