Title: Characterisation of ALCVD ZrO2 thin films by TEM
Authors: Richard, Olivier ×
Bender, Hugo
Houssa, Michel
Zhao, Chao #
Issue Date: 2001
Publisher: IOP
Host Document: pages:407-410
Conference: Microscopy of Semiconducting Materials - MSMXII location:Leuven Belgium date:25/03/01
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section
× corresponding author
# (joint) last author

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