|ITEM METADATA RECORD
|Title: ||Characterisation of ALCVD ZrO2 thin films by TEM|
|Authors: ||Richard, Olivier ×|
Zhao, Chao #
|Issue Date: ||2001 |
|Host Document: ||pages:407-410|
|Conference: ||Microscopy of Semiconducting Materials - MSMXII location:Leuven Belgium date:25/03/01|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Semiconductor Physics Section|
× corresponding author|
# (joint) last author|
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