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Title: IR-LST a powerful non-invasive tool to observe crystal defects in as-grown silicon, after device processing, and in heteroepitaxial layers
Authors: Kissinger, G ×
Vanhellemont, Jan
Graf, D
Claeys, Cor
Richter, H #
Issue Date: 1996
Host Document: pages:19-24
Conference: Defect Recognition and Image Processing in Semiconductors 1995. Proceedings of the Sixth International Conference; 3-6 Dec. 1995
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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