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Title: Investigation of oxygen precipitation related crystal defects in processed silicon wafers by infrared light scattering tomography
Authors: Kissinger, G ×
Vanhellemont, Jan
Simoen, Eddy
Claeys, Cor
Richter, H #
Issue Date: 1996
Series Title: Materials Science and Engineering B vol:B36 pages:225-229
ISSN: 0921-5107
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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