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Title: Enhancement of AlCVD TiN growth on Si-O-C and a-SiC:H films by O2-based plasma treatments
Authors: Satta, Alessandra
Baklanov, Mikhaïl
Richard, Olivier
Vantomme, André
Bender, Hugo
Conard, Thierry
Maex, Karen
Lin, Bill
Elers, K. E
Haukka, S
Issue Date: 2001
Conference: MAM European Workshop; 5-7 March 2001; Sigtuna, Sweden.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Physics and Astronomy - miscellaneous
Nuclear and Radiation Physics Section
Associated Section of ESAT - INSYS, Integrated Systems

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