Title: Effect of in situ boron doping on properties of silicon germanium films deposited by chemical vapor deposition at 400 degrees C
Authors: Sedky, Sherif ×
Witvrouw, Ann
Saerens, Annelies
Van Houtte, Paul
Poortmans, Jef
Baert, Kris #
Issue Date: 2001
Series Title: Journal of Materials Research vol:16 issue:9 pages:2607-2612
ISSN: 0884-2914
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Mechanical Metallurgy Section (-)
× corresponding author
# (joint) last author

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