Title: Steady state oxygen surface content in oxygen sputtered silicon at impact energy of 5 Kev per atom
Authors: Serrano, J. J
Blanco, J. M
Guzman, B
De Witte, H
Vandervorst, Wilfried #
Issue Date: 2001
Series Title: Journal of Applied Physics vol:90 issue:9 pages:4456-4466
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
# (joint) last author

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