Title: Simulation of the initial transient of the Si+ and O+ signals from oxygen sputtered silicon by means of independent models on sputtering and secondary ionization
Authors: Serrano, J. J
De Witte, H
Vandervorst, Wilfried
Guzman, B
Blanco, J. M #
Issue Date: 2001
Series Title: Journal of Applied Physics vol:89 issue:9 pages:5191-5198
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science