Title: Controllable change of porosity of 3-methylsilane low-k dielectric film
Authors: Shamiryan, Denis ×
Baklanov, Mikhaïl
Vanhaelemeersch, Serge
Maex, Karen #
Issue Date: 2001
Series Title: Electrochemical and Solid-State Letters vol:4 issue:1 pages:F3-F5
ISSN: 1099-0062
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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