Title: Reliability of copper dual damascene influenced by pre-clean
Authors: Tokei, Zsolt ×
Lanckmans, Filip
Van den Bosch, Geert
Van Hove, Marleen
Maex, Karen
Bender, Hugo
Hens, S
Van Landuyt, J #
Issue Date: 2002
Publisher: IEEE
Host Document: pages:118-123
Conference: Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits - IPFA location:Leuven Belgium date:08/07/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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