Title: Barrier process development for damascene integration of porous SiLK resin films
Authors: Tokei, Zsolt ×
Waeterloos, Joost
Iacopi, Francesca
Caluwaerts, Rudy
Struyf, Herbert
Van Aelst, Joke
Maex, Karen #
Issue Date: 2002
Publisher: MRS
Host Document: pages:307-311
Conference: Advanced Metallization Conference 2001 location:Leuven Belgium date:09/10/01
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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