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Title: Integration issues of polysilicon with high k dielectrics deposited by Atomic Layer Chemical Vapor Deposition
Authors: Tsai, Wilman ×
Chen, Jian
Carter, Richard
Cartier, Eduard
Cosnier, Vincent
Kluth, Jon
Richard, Olivier
Lin, Steven
Maes, Jos
Conard, Thierry
Caymax, Matty
Rittersma, Chris
Young, Edward
Vandervorst, Wilfried
De Gendt, Stefan
Heyns, Marc #
Issue Date: 2002
Publisher: Electrochemical Society
Host Document: pages:747-760
Conference: Semiconductor Silicon 2002. Proceedings of the 9th International Symposium on Silicon Materials Science and Technology date:12/05/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Solid State Physics and Magnetism Section
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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