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Title: The spacer/replacer concept: a viable route for sub-100 nm ultrathin-film fully-depleted SOI CMOS
Authors: Van Meer, Hans ×
De Meyer, Christina #
Issue Date: 2002
Series Title: IEEE Electron Device Letters vol:23 issue:1 pages:46-48
ISSN: 0741-3106
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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