|ITEM METADATA RECORD
|Title: ||Effect of implant oxide on ultra-shallow junction formation|
|Authors: ||Lindsay, Richard ×|
de Potter de ten Broeck, Muriel
Maex, Karen #
|Issue Date: ||2002 |
|Series Title: ||Journal of Vacuum Science & Technology B vol:20 issue:6 pages:2225-2228|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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