Title: Effect of implant oxide on ultra-shallow junction formation
Authors: Lindsay, Richard ×
Lauwers, Anne
Fruehauf, Jens
de Potter de ten Broeck, Muriel
Maex, Karen #
Issue Date: 2002
Series Title: Journal of Vacuum Science & Technology B vol:20 issue:6 pages:2225-2228
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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