Title: Damascene integration feasability of porous SiLK resin films
Authors: Waeterloos, Joost ×
Struyf, Herbert
Van Aelst, Joke
Das, Arabinda
Caluwaerts, Rudy
Alaerts, Carine
Boullart, Werner
Tokei, Zsolt
Van Hove, Marleen
Maex, Karen #
Issue Date: 2002
Publisher: MRS
Host Document: pages:19-24
Conference: Advanced Metallization Conference 2001 date:09/10/01
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science