Title: Postdeposition-anneal effect on negative bias temperature instability in HfSiON gate stacks
Authors: Aoulaiche, Marc ×
Houssa, Michel
Conard, Thierry
De Gendt, Stefan
Groeseneken, Guido
Maes, Herman
Heyns, Marc #
Issue Date: Mar-2007
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Transactions on Device and Materials Reliability vol:7 issue:1 pages:146-151
ISSN: 1530-4388
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Molecular Design and Synthesis
Semiconductor Physics Section
Associated Section of ESAT - INSYS, Integrated Systems
Department of Materials Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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