Title: Charge characterization in metal-gate/high-k layers: Effect of post-deposition annealing and gate electrode
Authors: O'Sullivan, Barry J. ×
Pourtois, Geoffrey
Kaushik, Vidya S.
Schram, Tom
Kittl, Jorge
Pantisano, Luigi
De Gendt, Stefan
Heyns, Marc #
Issue Date: Jul-2007
Series Title: Applied Physics Letters vol:91 issue:3 pages:33502-1-33502-3
Article number: 33502
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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