Title: Composite polymer core-–silica shell abrasives: effect of polishing time and slurry solid content on oxide CMP
Editors: Armini, Silvia
Whelan, Caroline
Moinpour, Mansour
Maex, Karen
Issue Date: Jun-2007
Publisher: 2007-00
Series Title: Electrochemical and Solid-State Letters vol:10 issue:9 pages:H243-H247
ISSN: 1099-0062
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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