Title: Direct measurement of top and sidewall interface trap density in SOI FinFETs
Authors: Kapila, Gautam ×
Kaczer, Ben
Nackaerts, Axel
Collaert, Nadine
Groeseneken, Guido #
Issue Date: Mar-2007
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Electron Device Letters vol:28 issue:3 pages:232-234
ISSN: 0741-3106
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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