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Title: Charge pumping spectroscopy: HfSiON defect study after substrate hot electron injection
Authors: Toledano-Luque, M ×
Pantisano, Luigi
Degraeve, Robin
Zahid, Mohammed
Ferain, Isabelle
San Andres Serrano, Enrique
Groeseneken, Guido
De Gendt, Stefan #
Issue Date: Sep-2007
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:84 issue:9-10 pages:1943-1946
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
Molecular Design and Synthesis
× corresponding author
# (joint) last author

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