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Title: Mobility extraction using RFCV for 80nm MOSFET with 1nm EOT HfSiON/TiN
Authors: San Andrés Serrano, Enrique ×
Pantisano, Luigi
Severi, Simone
Trojman, Lionel
Ferain, Isabelle
Toledano-Luque, M.
Jurczak, Malgorzata
Groeseneken, Guido
De Gendt, Stefan
Heyns, Marc #
Issue Date: Sep-2007
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:84 issue:9-10 pages:1878-1881
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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