Title: Factors affecting an efficient sealing of porous low-K dielectrics by physical vapor deposition Ta(N) thin films
Authors: Iacopi, Francesca ×
Tokei, Zsolt
Le, Quoc Toan
Shamiryan, Denis
Conard, Thierry
Brijs, Bert
Kreissig, U
Van Hove, Marleen
Maex, Karen #
Issue Date: 2002
Series Title: Journal of Applied Physics vol:92 issue:3 pages:1548-1554
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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