Informacije MIDEM
Author:
Keywords:
Science & Technology, Technology, Engineering, Electrical & Electronic, Materials Science, Multidisciplinary, Engineering, Materials Science, semiconductors, electronics, microelectronics, IC, Integrated Circuits, lossy interconnections, VLSI multilayer circuits, Very Large Scale of Integration multilayer circuits, capacitance matrices, interconnect conductors, Fourier projection method, mutual capacitance, Mei method, Green functions, CAD, Computer Aided Design, TRANSMISSION-LINES, FORMULAS, Applied Physics
Abstract:
In this paper, we present a new approach for capacitance matrix calculation of lossy multilayer VLSI interconnects based on quasi-static analysis and Fourier projection technique. The formulation is independent from the position of the interconnect conductors and number of layers in the structure, and is especially adequate to model 2-D and 3-D layered structures with planar boundaries. Thanks to the quasi-static algorithms considered for the capacitance analysis and the expansions in terms of convergent Fourier series the tool is reliable and very efficient; results can be obtained with relatively little programming effort. The validity of the technique is verified by comparing its results with on-surface MEI method, moment method for total charges in the structure, and CAD-oriented equivalent-circuit methodology, respectively.