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Title: Ultra-shallow junctions formed by Co-implantation and sub-melt laser annealing
Authors: Felch, S.B ×
Falepin, Annelies
Severi, Simone
Augendre, Emmanuel
Noda, Taiji
Parihar, V
Nouri, F
Hoffmann, Thomas Y
Pawlak, Bartek
Collart, E
Graoui, H
Eyben, Pierre
Vandervorst, Wilfried
Thirupapuliyur, S
Schreutelkamp, Rob #
Issue Date: 2006
Publisher: ECS
Host Document: pages:105-112
Conference: Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 2: New Materials, Processes, and Equipment location:Sunnyvale, CA USA date:29/10/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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