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Title: Impact of Ni-silicide grain orientation on the strain and stress fields induced in patterned silicon
Authors: Torregiani, Cristina ×
Maex, Karen
Benedetti, Alessandro
Bender, Hugo
Van Houtte, Paul
Pawlak, Bartek
Kittl, Jorge #
Issue Date: 2007
Series Title: Applied Physics Letters vol:90 issue:5
Article number: 54101
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
Mechanical Metallurgy Section (-)
× corresponding author
# (joint) last author

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