Title: Oxide CMP as a test vehicle for defectivity during CMP with composite polymer core – silica shell abrasives designed for scratch reduction during Cu CMP
Authors: Armini, Silvia ×
Moinpour, Mansour
Whelan, Caroline
Maex, Karen
Hernandez, Jose Luis #
Issue Date: 2007
Conference: CMP-MIC Conference Proceedings location:Leuven Belgium date:06/03/07
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.