Title: Defectivity study during oxide CMP with composite polymer core – silica shell abrasives: the effect of the silica particle shape
Authors: Armini, Silvia ×
Moinpour, Mansour
Whelan, Caroline
Maex, Karen #
Issue Date: 2007
Conference: CMP-MIC Conference Proceedings location:Leuven Belgium date:05/03/07
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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