|ITEM METADATA RECORD
|Title: ||Defectivity study during oxide CMP with composite polymer core silica shell abrasives: the effect of the silica particle shape|
|Authors: ||Armini, Silvia ×|
Maex, Karen #
|Issue Date: ||2007 |
|Conference: ||CMP-MIC Conference Proceedings location:Leuven Belgium date:05/03/07|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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