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Title: Influence of oxygen desorption on in-situ analysis of the surface composition during O_2+ bombardment of Si
Authors: Janssens, Tom ×
Vandervorst, Wilfried #
Issue Date: Feb-2007
Publisher: North-Holland Pub. Co.
Series Title: Surface Science vol:601 issue:3 pages:763-771
ISSN: 0039-6028
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Vesalius Research Centre (-)
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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