Title: Germanium content dependence of the leakage current of recessed SiGe source/drain junctions
Authors: Simoen, Eddy ×
Bargallo Gonzalez, Mireia
Eneman, Geert
Verheyen, Peter
Benedetti, Alessandro
Bender, Hugo
Loo, Roger
Claeys, Corneel #
Issue Date: Jul-2007
Publisher: Chapman and Hall
Series Title: Journal of Materials Science. Materials in Electronics vol:18 issue:7 pages:787-791
ISSN: 0957-4522
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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