Title: Silicidation and metallization issues using rapid thermal processing
Authors: Maex, Karen # ×
Issue Date: 1996
Host Document: pages:333-374
Conference: Advances in Rapid Thermal and Integrated Processing; NATO advanced study institute on Advances in Rapid Thermal and Integrated P
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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