Title: Effect of Fe contamination on quality of poly silicon gate structures
Authors: Mertens, Paul ×
De Gendt, Stefan
Depas, Michel
Kenis, Karine
Opdebeeck, Ann
Snee, Peter
Gräf, D
Brown, G
Heyns, Marc #
Issue Date: 1996
Host Document: pages:33-6
Conference: Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '96); 23-25 Sept. 1996; Antw location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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