Title: The importance of H-passivation for low-temperature APCVD silicon epitaxy
Authors: Mouche, M. J ×
Caymax, Matty
Bender, Hugo
Storm, Wolfgang
Vandervorst, Wilfried #
Issue Date: 1996
Host Document: pages:269-72
Conference: Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '96); 23-25 Sept. 1996; Antw
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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