|ITEM METADATA RECORD
|Title: ||The importance of H-passivation for low-temperature APCVD silicon epitaxy|
|Authors: ||Mouche, M. J ×|
Vandervorst, Wilfried #
|Issue Date: ||1996 |
|Host Document: ||pages:269-72|
|Conference: ||Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '96); 23-25 Sept. 1996; Antw|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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