|ITEM METADATA RECORD
|Title: ||Characterisation of the local stress in CoSi2 silicided shallow trench isolation structures|
|Authors: ||Stuer, Cindy|
Van Landuyt, J
Maex, Karen #
|Issue Date: ||2001 |
|Host Document: ||pages:481-484|
|Conference: ||Microscopy of Semiconducting Materials - MSMXII location:Antwerpen Belgium date:25/03/01|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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