Title: Characterisation of the local stress in CoSi2 silicided shallow trench isolation structures
Authors: Stuer, Cindy
Steegen, A
Bender, Hugo
Van Landuyt, J
Maex, Karen #
Issue Date: 2001
Publisher: IOP
Host Document: pages:481-484
Conference: Microscopy of Semiconducting Materials - MSMXII location:Antwerpen Belgium date:25/03/01
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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